International Conference
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Y. Mori, K. Yamauchi, K. Yamamura, H. Mimura, A. Saito,Y. Sano, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku and T. Ishikawa, M. Shimura, and Y. Ishizaka
Fabrication technology of hard X-ray aspherical mirror optics and application to nanospectroscopy
Proc. SPIE, San Diego (2003).
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Y. Mori, K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, A. Saito, K. Ueno, K. Endo, A. Souvorov, M. Yabashi, K. Tamasaku and T. Ishikawa
Developement of figure correction method having spatial resolution close to 0.1mm.
Proc. SPIE 4, San Diego (2003).
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Yuzo Mori, Kazuya Yamamura, Katsuyoshi Endo, Kazuto Yamauchi, Kiyoshi Yasutake, Hidekazu Goto, Hiroaki Kakiuchi, Yasuhisa Sano, Hidekazu Mimura
Creation of perfect surfaces
The 14th international conference on crystal growth
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K. Yamauchi, K. Yamamura, H. Mimura, Y. Sano, S. Matsuyama, H. Yumoto, K. Ueno, M. Shibahara, K. Endo, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa and Y. Mori
Fabrication technology of ultraprecise mirror optics to realize hard X-ray nanobeam
Proc. of SPIE, 5533, Denver, 116 (2004).
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H. Mimura, H. Yumoto, K. Yamamura, Y. Sano, S. Matsuyama, K. Ueno, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa and K. Yamauchi
Microstitching Interferometry for hard X-ray nanofocusing mirrors
Proc. of SPIE, 5533, 171 Denver, (2004).
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S. Matsuyama, H. Mimura, K. Yamamura, H. Yumoto, Y. Sano, K. Endo, Y. Mori, M. Yabashi, K. Tamasaku, Y. Nishino, T. Ishikawa and K. Yamauchi
Wave-optical and ray-tracing analysis to establish a two dimensional focusing unit using K-B arrangement
Proc. of SPIE, 5533, Denver, 181 (2004).
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Y. Ichii, K. Yagi, T. Ono, H. Goto, K. Inagaki, K. Yamauchi, K. Endo, Y. Mori and K. Hirose
First-Principles Molecular-Dynamics Simulations of Electrochemical Etching Process on Al(001) Cathode Surface
The 7th Asian Workshop on First-Principles Electronic Structure Calculations, pp. 84-84, (November 1-3, 2004 Taipei, Taiwan).
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K. Yagi, Y. Ichii, T. Ono, H. Goto, K. Inagaki, K. Yamauchi, K. Endo, Y. Mori and K. Hirose
First-Principles Molecular-Dynamics Simulations of Dissociation Process of Water Molecule by Catalytic Reaction of Ion-Exchange Group
The 7th Asian Workshop on First-Principles Electronic Structure Calculations, pp. 140-140, (November 1-3, 2004 Taipei, Taiwan).
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K. Yamauchi
Surface figure metrology of X-ray mirrors using optical interferometry
Production Metrology for Precision Surface
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H. Mimura
Development of hard X-ray nanofocusing system using ultraprecisely figured mirrors at SPring-8
The 9th SPring-8, ESRF, APS Workshop
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H. Mimura
Development of surface figuring and smoothing technologies for ultraprecise X-ray mirror fabrication at Osaka university.
The 9th SPring-8, ESRF, APS Workshop
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K. Arima, K. Yamauchi, H. Mimura, A. Kubota, K. Inagaki, Y. Mori and K. Endo
Atomic-Scale Evaluation of Si(001) Surfaces Finished by Novel Global Planarization Process
13th International Conference on Scanning Tunneling Microscopy/Spectroscopy and Related Techniques (STM'05) (July 3-8, 2005 Sapporo Convention Center, Japan), 335.
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J. Katoh, A. Kubota, H. Mimura, K. Yamauchi, K. Arima, K. Inagaki, Y. Mori and K. Endo
Investigation of machining mechanism in Elastic Emission Machining (EEM) on the atomic scale
13th International Conference on Scanning Tunneling Microscopy/Spectroscopy and Related Techniques (STM'05) (July 3-8, 2005 Sapporo Convention Center, Japan), 89.
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M. Shibahara, K. Yamamura, Y. Sano, T. Sugiyama, K. Endo and Y. Mori
Improvement of thickness uniformity of quartz crystal wafer by numerically controlled plasma CVM
Proc. SPIE 5869, 58690I (July 31- August 4, 2005 San Diego, USA).
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S. Matsuyama, H. Mimura, H, Yumoto, K. Yamamura, Y. Sano, K. Endo, Y. Mori, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
Hard x-ray nanofocusing at 40-nm level using K-B mirror optics for nanoscopy/spectroscopy
Proc. SPIE 5918, 591804 (July 31- August 4, 2005 San Diego, USA).
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Y. Higashi, Y. Takaie, K. Endo, T. Kume, K. Enami, K. Yamauchi, K. Yamamura, Y. Sano, K. Ueno, Y. Mori
A new designed ultra-high precision profiler
Proc. SPIE 5921, 592107 San Diego (July 31- August 4, 2005 San Diego, USA).
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H. Mimura, H, Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Endo, Y. Mori, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, K. Yamauchi
Surface figuring and measurement methods with spatial resolution close to 0.1 mm for x-ray mirror fabrication
Proc. SPIE 5921, 59210M (July 31- August 4, 2005 San Diego, USA).
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Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi
Scanning hard-X-ray microscope with spatial resolution better than 50nm using K-B mirror optics
Program and Abstracts, 8th International Conference on X-ray Microscopy, 109 (July 26-30, 2005 Himeji, Japan).
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Hidekazu Mimura, Satoshi Matsuyama, Hirokatsu Yumoto, Hideyuki Hara, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, Kazuto Yamauchi
Hard X-ray diffraction-limited nanofocusing with unprecedentedly accurate mirrors
Program and Abstracts, 8th International Conference on X-ray Microscopy, 26 (July 26-30, 2005 Himeji, Japan).
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Yasuo Higashi, Yuichi Takaie, Katsuyoshi Endo, Tatsuya Kume, Kazuhiro Enami, Kazuto Yamauchi, Kazuya Yamamura, Yasuhisa Sano, Kenji Ueno, Yuzo Mori
A New Designed Ultra-high Precision Profiler - Study on slope error measurement of a mandrel for Wolter type-I mirror fabrication -
Program and Abstracts, 8th International Conference on X-ray Microscopy, 264 (July 26-30, 2005 Himeji, Japan).
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Y. Sano, K. Yamamura, K. Endo, Y. Mori
Plasma Chemical Vaporization Machining (PCVM)
Book of Lecture Note, IWCGT-3, 305-316 (September 10-18, 2005 Beatenberg, Switzerland).
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K. Yamauchi, H. Mimura, K. Endo, Y. Mori
Elastic Emission Machining (EEM)
Book of Lecture Note, IWCGT-3, 317-326 (September 10-18, 2005 Beatenberg, Switzerland).
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H. Mimura, H. Yumoto, S. Matsuyama, H. Hara, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi
Stitching Interferometry for Surface Figure Measurement of X-ray Reflective Optics
The 89th OSA Annual Meeting, 2005 Frontiers in Optics/Laser Science conferences (October 16-20, 2005, Tuscon, Arizona, USA).
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H. Yumoto, H. Mimura, S. Matsuyama, H. Hara, K. Yamamura, Y. Sano, K. Ueno, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, K. Yamauchi
Focusing Hard X-rays to Sub-50 nm Size by Elliptically Figured Mirror
The 89th OSA Annual Meeting, 2005 Frontiers in Optics/Laser Science conferences (October 16-20, 2005, Tuscon, Arizona, USA)
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K. Yamauchi, H. Mimura, T. Matsuyama, H. Yumoto, K. Yamamura, Y. Sano, K. Endo, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa, and Y. Mori
Development of Elliptical Kirkpatrick-Baez Mirrors for Hard X-ray Nanofocusing
The 89th OSA Annual Meeting, 2005 Frontiers in Optics/Laser Science conferences (October 16-20, 2005, Tuscon, Arizona,USA)
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Y. Ichii, Y. Mori, H. Hirose, K. Endo, K. Yamauchi, K. Yagi and H. Goto
Electrochemical Etching Using Surface Modified Graphite Electrodes in Ultrapure Water
Proceedings of ACEC2005 (The 5th Asian Conference on Electrochemistry), Shanghai, China, 1P14, (2005).
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K. Yamamura, Y. Sano, M. Shibahara, K. Yamauchi, H. Mimura, K. Endo
Ultra precision machining utilizing numerically controlled scanning of localized atmospheric pressure plasma
Proc. ICRP6/SPP23, Sendai, Japan, 81-82, (2006)
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Kenta Arima, Kazuto Yamauchi, Hidekazu Mimura, Akihisa Kubota, Kouji Inagaki, Yuzo Mori, and Katsuyoshi Endo
Atomic-level STM analyses of Si(001) surfaces prepared in aqueous environment
Abstract Book of 33rd Conference on the Physics & Chemistry of Semiconductor Interfaces, Florida, USA, Mo1355, (2006).
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Y. Sano, M. Watanabe, K. Yamamura, K. Yamauchi, T. Ishida, K. Arima, A. Kubota, and Y. Mori
Polishing characteristics of silicon carbide by plasma chemical vaporization machining
Proc. ICRP-6/SPP-23, 303-304 (January 24-27, 2006, Matsushima, Japan).
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Yoshio Ichii and Hidekazu Goto
Development of Low-emission Chemical Etching Method for Nano-structure Fabrication on Silicon
Handai Nanoscience and Nanotechnology International Symposium, p.95 (Osaka, January, 30th 2006)
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Y. Sano, K. Yamamura, H. Mimura, K. Yamauchi, A. Kubota, and Y. Mori
Cutting of functional materials by plasma chemical vaporization machining with inner-diameter blade electrode
Proc. ICRP-6/SPP-23, 305-306 (January 24-27, 2006, Matsushima, Japan).
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Yoshio Ichii and Hidekazu Goto
Development of Low-emission MEMS Process
4th ISE(The International Society of Electrochemistry) Spring Meeting 2006, P.167 (Singapore, April, 17th to 20th, 2006)
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Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Soichiro Handa,Keiko Katagishi, Akihiko Shibatani, Kazuya Yamamura, Yasuhisa Sano,Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa and Kazuto Yamauchi
Development of K-B Mirror Manipulator for Hard X-ray Sub-50nm Focusing
International Workshop on Mechanical Engineering Design of Synchrotron Radiation Equipment and Instrumentation 2006 (MEDSI2006), (May 24 - 26, 2006, Hygo, Japan)
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H. Mimura, H. Yumoto, S. Matsuyama, K. Yamamura, Y. Sano, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi
Development of Surface Measurement Technologies for Hard X-ray Nanofocusing Mirror at Osaka University and SPring-8
The 3rd International Workshop on Metrology for X-ray Optics, (May 27-May 28, 2006, Daegu, Korea).
- K. Yamauchi, H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, K. Yamamura, Y. Sano, K. Endo, Y. Mori, Y. Nishino, K. Tamasaku, M. Yabashi, T. Ishikawa(Invited)
Hard X-ray Focusing less than 50nm for Nanoscopy/spectroscopy
SRI2006(The Ninth International Conference on Synchrotron Radiation Instrumentation), (May 28-June 2, 2006, Daegu, Korea).
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Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Akihiko Shibatani, Keiko Katagishi, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, and Kazuto Yamauchi
Fabrication of X-ray Mirror for Hard X-ray Diffraction Limited Nanofocusing
SRI2006(The Ninth International Conference on Synchrotron Radiation Instrumentation) EP-095 (May 28-June 2, 2006, Daegu, Korea).
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Satoshi Matsuyama, Hidekazu Mimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Katsuyoshi Endo, Yuzo Mori, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa and Kazuto Yamauchi
Development of a Scanning X-ray Fluorescence Microscope Using Size-Controllable Focused X-ray Beam from 50 to 1500nm
The 9th International Conference on Synchrotron Radiation Instrumentation (SRI 2006), (May 28 - June 03, Deagu, Korea)
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K. Yamauchi, H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, Y. Sano, K. Yamamura, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa(Invited)
Diffraction-limited X-ray nanobeam with KB mirrors
ERL X-ray Science Workshops 6, Workshop on New Science Opportunities with Nanometer-Sized X-Ray Beams, (June23, June24, 2006, Ithaka, NewYork, USA).
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H. Mimura and K. Yamauchi
Hard X-ray nano-focusing with ultraprecisely figured mirrors, ESRF, APS, SPring-8
The 10 the Three-Way Meeting (June19-June21 2006, ESRF, Grenoble, France).
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H. Mimura, H. Yumoto, S. Matsuyama, S. Handa, Y. Sano, K. Yamamura, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi
Hard X-ray focusing with a beam size less than 30 nm by total reflection mirror
ERL X-ray Science Workshops 6, Workshop on New Science Opportunities with Nanometer-Sized X-Ray Beams, (June23-June24, 2006, Ithaca, NewYork, USA).
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Yasuhisa Sano, Kazuya Yamamura, Hidekazu Mimura, Kazuto Yamauchi, Akihisa Kubota and Yuzo Mori
Fabrication of ultra thin and highly uniform silicon-on-insulator by numerically controlled plasma chemical vaporization machining
8th Asia-Pacific Conference on Plasma Science and Technology and 19th Symposium on Plasma Science for Materials (APCPST-8/SPSM-19), (2-5th July, 2006, Cairns, Australia)
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H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, A. Shibatani, K. Katagishi, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa, and K. Yamauchi
Waveoptical simulation for designing and evaluating hard X-ray nanofocusing mirror
Proc. SPIE Vol.6317, 631718 (2006). (August 13-17 2006, San Diego, California USA).
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Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Soichiro Handa, Akihiko Shibatani, Keiko Katagishi, Yasuhisa Sano, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, and Kazuto Yamauchi
At-wavelength figure metrology of total reflection mirrors in hard x-ray region
Proc. SPIE Vol.6317, 631709 (2006). (August 13-17 2006, San Diego, California USA).
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Hirokatsu Yumoto, Hidekazu Mimura, Satoshi Matsuyama, Souichiro Handa, Kazuya Yamamura, Yasuhisa Sano, Katsuyoshi Endo, Yuzo Mori, Makina Yabashi, Yoshinori Nishino, Kenji Tamasaku, Tetsuya Ishikawa, and Kazuto Yamauchi
Fabrication of ultraprecisely figured mirror for nano focusing hard-x-ray
The 11th International Conference on Precision Engineering (ICPE), 295-300 (August 16-18, 2006, Tokyo, Japan)
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Hideyuki Hara, Yasuhisa Sano, Hidekazu Mimura, Kenta Arima, Akihisa Kubota, Keita Yagi, Junji Murata and Kazuto Yamauchi
Novel abrasive-free planarization of Si and SiC using catalyst
The 11th International Conference on Precision Engineering (ICPE), 267-270 (August 16-18, 2006, Tokyo, Japan)
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Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhis Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa and Kazuto Yamauchi
High-spatial-resolution scanning X-ray fluorescence microscope with Kirkpatrick-Baez mirrors
Proc. SPIE 6317, 631719, (August 13- 17, 2006 San Diego, USA).
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Keiko Katagishi, Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa and Kazuto Yamauchi
Observation of Intracellular Elements by Scanning X-ray Fluorescence Microscopy with Spatial Resolution of 50nm
The 16th International Microscopy Congress (IMC16), Vol2, 1049, (September 3 - 8, 2006, Sapporo, Japan)
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Satoshi Matsuyama, Hidekazu Mimura, Mari Shimura, Hirokatsu Yumoto, Keiko Katagishi, Soichiro Handa, Akihiko Shibatani, Yasuhisa Sano, Kazuya Yamamura, Katsuyoshi Endo, Yuzo Mori, Yoshinori Nishino, Kenji Tamasaku, Makina Yabashi, Tetsuya Ishikawa and Kazuto Yamauchi
Scanning X-ray Fluorescence Microscope Using Kirkpatrick-Baez Optics with Spatial Resolution Better than 50nm
The 16th International Microscopy Congress (IMC16), Vol2, 1030, (September 3 - 8, 2006, Sapporo, Japan)
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Hideyuki Hara, Yasuhisa Sano, Hidekazu Mimura, Kenta Arima, Akihisa Kubota, Keita Yagi, Junji Murata and Kazuto Yamauchi
Damage-free Planarization of 4H-SiC (0001) by Catalyst-Referred Etching
Programme of The 6th European Conference on Silicon Carbide and Related Materials (ECSCRM 2006), 28, (Sep 3-7, 2006, Newcastle upon Tyne, UK)
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Yasuhisa Sano, Masayo Watanabe, Kazuya Yamamura, Kazuto Yamauchi, Takeshi Ishida, Kenta Arima, Akihisa Kubota and Yuzo Mori
Polishing characteristics of 4H-SiC Si-face and C-face by plasma chemical vaporization machining
Programme of The 6th European Conference on Silicon Carbide and Related Materials (ECSCRM 2006), 34, (Sep 3-7, 2006, Newcastle upon Tyne, UK)
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K. Yamauchi(Invited)
Elastic Emission Machining for the Fabrication of X-ray and EUV Mirrors
OSA Optical Fabrication and Testing Topical Meeting, (October 9 - 11, 2006, Rochester USA).
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H. Yumoto, H. Mimura, S. Matsuyama, S. Handa, A. Shibatani, K. Katagishi, Y. Sano, K. Yamamura, Y. Mori, K. Tamasaku, M. Yabashi, Y. Nishino, T. Ishikawa and K. Yamauchi
Fabrication Technology of Total Reflection Mirrors to Realize Hard-x-ray Sub-30-nm Focusing
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, 2.4, (2006).
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S. Matsuyama, H. Mimura, H. Yumoto, Y. Sano, K. Yamamura, K. Endo, Y. Mori, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa and K. Yamauchi
Development of Scanning X-ray Fluorescencs Microscope with Spatial Resolution Better Than 30nm Using K-B Mirror Optics
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, 2.5, (2006).
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Y. Sano, T. Masuda, H. Mimura and K. Yamauchi
Development of Numerically Controlled Sacrificed Oxidation Using Atmospheric Pressure Plasma
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, 3.2, (2006).
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Y. Ichii and H. Goto
Fabrication of Flat Silicon Surfaces Using Eco-friendly Electrochemical Etching Process on Cathode
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, 3.3, (2006).
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H. Hara, Y. Sano, K. Arima, K. Yagi, J. Murata, A. Kubota, H. Mimura and K. Yamauchi
Development of CAtalyst-Referred Etching
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, 3.4, (2006).
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H. Mimura , H. Yumoto, S. Matsuyama, Y. Sano, K. Yamamura, Y. Mori, K. Tamasaku, M. Yabashi, Y. Nishino, T. Ishikawa and K. Yamauchi
Development of High-resolution Computer-controlled Figuring System and Application to X-ray Reflective Optics
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, P12, (2006).
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K. Yagi, J. Murata, H. Hara, Y. Sano, K. Yamauchi and H. Goto
Fabrication of Damascene Cu Wiring Using Solid Acid Catalyst
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, P13, (2006).
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K. Arima, H. Hara, K. Yagi, R. Okamoto, H. Mimura, A. Kubota, K. Yamauchi
Atomic-scale Characterization of HF-treated 4H-SiC (0001) 1x1 Surfaces by Scanning Tunneling Microscopy
Materials Research Society Abstract No. H7.6 2007, San Francisco, CA, USA (2007)
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H. Takino, K. Ara, N. Shibata, K. Yamamura, Y. Sano, and Y. Mori
Shape correction of steep curved surface using plasma chemical vaporization machining with a hemispherical tip electrode
Proceedings of the 7th euspen International Conference, 193-196 (May 20-24, 2007, Bremen, Germany).
-
S. Matsuyama
Scanning Hard X-ray Microscopy with Spatial Resolution Better than 50 nm
NSF-MEXT Exchange program for Japan-US young researchers (June 1, 2007, Osaka, Japan)
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M. Kanaoka, C, Liu, K. Nomura, M. Ando, H. Takino, Y. Fukuda, Y. Mori, H. Mimura, K. Yamauchi
Figuring and smoothing capabilities of elastic emission machining for low-thermal-expansion glass optics
Abstracts of 51th Int. Conf. on Electron, Ion, Photon Beam Technology and Nanofabrication, PM-11.(May 29 - June 1, 2007)
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K. Yamauchi(Invited)
Recent achievement in nano-focusing of hard X-rays,
Workshop on X-ray optics and application(Japan, Tsukuba, Jul, 2007).
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Yasuhisa Sano, Takaya Masuda, Hidekazu Mimura, and Kazuto Yamauchi
Ultraprecision Finishing Technique by Numerically Controlled Sacrificial Oxidation
Proceedings of 15th International Conference on Crystal Growth, Abstract#586 (August 12-17, 2007, Salt Lake City, USA).
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Junji Murata, Akihisa Kubota, Keita Yagi, Yasuhisa Sano, Hideyuki Hara, Kenta Arima, Takeshi Okamoto, Hidekazu Mimura and Kazuto Yamauchi
Damage-free planarization of GaN using a catalyst plate
Proceedings of 15th International Conference on Crystal Growth, Abstract#789 (August 12-17, 2007, Salt Lake City, USA).
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Hideyuki Hara, Yasuhisa Sano, Kenta Arima, Keita Yagi, Junji Murata, Takeshi Okamoto, Hidekazu Mimura and Kazuto Yamauchi
New Crystal Planarization Technique using a catalyst plate
Proceedings of 15th International Conference on Crystal Growth, Abstract#769 (August 12-17, 2007, Salt Lake City, USA).
-
Y. Takahashi, Y. Nishino, T. Ishikawa, E. Matsubara
A new technique for three-dimensional internal structure analysis in metallic materials: Coherent x-ray diffraction microscopy
Book of abstracts of 56th Denver x-ray conference, Colorado, U.S.A, 207, (2007).
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Soichiro Handa, Hidekazu Mimura, Satoshi Matsuyama, Hirokatsu Yumoto, Takashi Kimura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi
Hard x-ray wavefront measurement and control for hard x-ray nanofocusing
SPIE Optics + Photonics 2007, August 26-30 2007, San Diego, California USA, (2007).
-
K. Yamauchi.(Invited)
Recent achievements and next strategies in hard-X-ray nano-focusing
Advanced X-Ray Optics Metrology for Nano-focusing and Coherence Preservation(USA,
Lawrence Berkeley National Laboratory, Oct. 5, 2007)
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Y. Sano, T. Masuda, H. Mimura, and K. Yamauchi
Ultra-precision Finishing of SOI wafer by Numerically Controlled Sacrificial Oxidation Using Atmospheric Pressure Plasma
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007, 33-34 (October 15-17, 2007, Osaka, Japan).
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Hidekazu Mimura, Hirokatsu Yumoto, Soichiro Handa,Takashi Kimura, Satoshi Matsuyama, Yasuhisa Sano, Yoshinori Nishino, Kenji Tamasaku, Yabashi Makina, Tetsuya Ishikawa and Kazuto Yamauchi
Experimental determination of the wave field of X-ray nanobeam
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007, 17-18 (Oct 15-17, 2007, Osaka, Japan)
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H. Furukawa, Y. Takahashi, H. Kubo, Y. Nishino, K. Yamauchi, T. Ishikawa, E. Matsubara
Coherent x-ray diffraction measurements of Cu thin line
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, P64 (2007)
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Y. Takahashi, H. Furukawa, H. Kubo, Y. Nishino, K. Yamauchi, T. Ishikawa, E. Matsubara
Three-dimensional observation of internal structures in metallic materials by coherent x-ray diffraction microscopye
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, 6.7 (2007)
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Junji Murata, Akihisa Kubota, Keita Yagi, Yasuhisa Sano, Hideyuki Hara, Kenta Arima, Takeshi Okamoto, Hidekazu Mimura and Kazuto Yamauchi
Novel abrasive-free planarization of GaN using a catalytic reference plate
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, P19 (2007)
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Hideyuki Hara, Yasuhisa Sano, Kenta Arima, Keita Yagi, Junji Murata, Akihisa Kubota, Hidekazu Mimura, Kazuto Yamauchi
Planarization Mechanism of Catalyst-Referred Etching
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007, 37-38 (Oct 15-17, 2007, Osaka, Japan)
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Soichiro Handa, Hidekazu Mimura, Hirokatsu Yumoto, Takashi Kimura, Satoshi Matsuyama, Yasuhisa Sano, and Kazuto Yamauchi
Highly accurate differential deposition for X-ray reflective optics
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007, 19-20 (Oct 15-17, 2007, Osaka, Japan)
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Satoshi Matsuyama, Hidekazu Mimura, Keiko Katagishi, Mari Shimura, Masaki Fujii, Hirokatsu Yumoto, Soichiro Handa, Takashi Kimura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishino, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi
High-resolution and Highly Sensitive Scanning X-ray Fluorescence Microscopy Using Kirkpatrick-Baez Mirror Optics
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology 2007, 81-82 (Oct 15-17, 2007, Osaka, Japan)
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Masaki Fujii, Satoshi Matsuyama, Mari Shimura, Keiko Katagishi, Hidekazu Mimura, Hirokatsu Yumoto, Soichiro Handa, Takashi Kimura, Yasuhisa Sano, Kenji Tamasaku, Yoshinori Nishin, Makina Yabashi, Tetsuya Ishikawa, and Kazuto Yamauchi
Development of Cryo Scanning X-ray Fluorescent Microscopy to Observe Frozen Hydrated Cells and Tissues
Extended Abstracts of International 21st Century COE Symposium on Atomistic Fabrication Technology, Osaka, Japan, P62 (2007)
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M. Kanaoka, C, Liu, K. Nomura, M. Ando, H. Takino, Y. Fukuda, Y. Mori, H. Mimura, K. Yamauchi
Processing efficiency of elastic emission machining for low-thermal-expansion material
Extended Abstracts of International 21st Century COE Symposium on Atomic Fabrication Technology 2007, 25-26
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Y. Sano, M. Watanabe, T. Kato, K. Yamamura, H. Mimura, and K. Yamauchi
Temperature Dependence of Plasma Chemical Vaporization Machining of Silicon and Silicon Carbide
International Conference on Silicon Carbide and Related Materials 2007, Mo-P-55 (October 15-19, 2007, Otsu, Japan).
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Junji Murata, Akihisa Kubota, Keita Yagi, Yasuhisa Sano, Hideyuki Hara, Kenta Arima, Takeshi Okamoto, Hidekazu Mimura and Kazuto Yamauchi
New Chemical Planarization of SiC and GaN Using Fe Plate in H2O2 solution
International Conference on Silicon Carbide and Related Materials 2007, Th-0B-3 (October 15-19, 2007, Otsu, Japan).
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T. Okamoto, Y. Sano, H. Hara, K. Arima, K. Yagi, J. Murata, H. Mimura and K. Yamauchi
Damage-free Planarization of 2-inch 4H-SiC Wafer Using Pt Catalyst Plate and HF Solution
International Conference on Silicon Carbide and Related Materials 2007 Technical Digest (ICSCRM 2007),We-94,(Oct.14-19,2007,Otsu,Japan)
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Takehiro Kato, Yasuhisa Sano, Hideyuki Hara, Hidekazu Mimura, Kazuya Yamamura and Kazuto Yamauchi
Beveling of Silicon Carbide Wafer by Plasma Chemical Vaporization Machining
International Conference Silicon Carbide and Related Materials 2007(ICSCRM2007), We-98, (Oct 14-19,2007,Otsu,Japan)
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K. Yamauchi
Focusing hard X-ray to sub-10nm by reflective optics
ESRF, SPring-8, APS Three-Way Meeting(March, 17-19,2008,Chicago,USA)
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H. Mimura, S. Morita, T. Kimura, D. Yamakawa, W. Lin, T. Uehara, H. Yumoto, S. Matsuyama, Y. Nishino, K. Tamasaku, H. Ohashi, M. Yabashi, T. Ishikawa, H. Omori, K. Yamauchi
Focusing mirror for X-ray free electron laser
ESRF, SPring-8, APS Three-Way Meeting(March, 17-19,2008,Chicago,USA)
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Y. Sano, K. Yamamura, K. Yamauchi and Y. Mori (Invited)
Crystal machining using atmospheric pressure plasma
4th International Workshop on Crystal Growth Technology(May 18 - 25, 2008, Beatenberg, Switzerland)
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K. Yamauchi, Y. Sano, K. Arima and H. Hara(Invited)
Catalyst-referred etching - novel abrasive-free polishing method
4th International Workshop on Crystal Growth Technology(May 18 - 25, 2008, Beatenberg, Switzerland)
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Takehiro Kato, Yasuhisa Sano, Tsutomu Hori, Kazuya Yamamura, Hidekazu Mimura, Yoshiaki Katsuyama, Kazuto Yamauchi
Thinning of SiC wafers by Plasma Chemical Vaporization Machining
The 4th Asian Conference on Crystal Growth and Crystal Technology, 189 (May 21-24, 2008, Sendai, Japan)
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K. Yamauchi, H. Mimura, S. Matsuyama, H. Yumoto, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku and T. Ishikawa (Invited)
Synchrotron-radiation-based hard X-ray nanobeam by Kirkpatrick-Baez mirrors
European Conference on X-ray Spectrometry (16-20 June 2008, Cavtat, Dubrovnik, CROATIA), Abstract p100(I13).
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S. Matsuyama, M. Shimura, H. Mimura, M. Fujii, H. Yumoto, S. Handa, T. Kimura, Y. Sano, M. Yabashi, Y. Nishino, K. Tamasaku, T. Ishikawa and K. Yamauchi
Trace element mapping using hard X-ray nanobeam focused by a Kirkpatrick Baez mirror system
European Conference on X-ray Spectrometry (16-20 June 2008, Cavtat, Dubrovnik, CROATIA), Abstract p88(O11-1).
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Y. Takahashi, H. Kubo, H. Furukawa, K. Yamauchi, E. Matsubara, T. Ishikawa, Y. Nishino
Development of element-specific hard-x-ray diffraction microscopy
9th International Conference of X-ray Microscopy, ETH Zentrum, Zurich, Switzerland, July 21-25, 2008
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Y. Takahashi, H. Furukawa, H. Kubo, K. Yamauchi, Y. Nishino, T. Ishikawa, E. Matsubara
Nanotstructure analysis of metallic materials by coherent x-ray diffraction microscopy
2008 denver x-ray conference, denver marriot tech center hotel, denver, colorad, USA, 4-8 August 2008
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K. Yamauchi(Invited)
X-ray focusing with Kirkpatrick-Baez optics
Workshop: Focus on X-ray Focusing, SPIE Optics + Photonics 2008(August 11-14 2007San, Diego, California USA)
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H. Mimura, S. Morita, T. Kimura, D. Yamakawa, W. Lin, Y. Uehara, S. Matsuyama, H. Yumoto, H. Ohashi, K. Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, H. Ohmori, and K. Yamauchi
Fabrication of a 400-mm-long mirror for focusing x-ray free-electron lasers to sub-100 nm
SPIE Optics + Photonics 2008(August 11-14 2007San, Diego, California USA) Proc. SPIE, Vol. 7077, 70770R (2008).
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T. Kimura, S. Handa, H. Mimura, H. Yumoto, D. Yamakawa, S. Matsuyama, Y. Sano, K.@Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi
Development of adaptive mirror for wavefront correction of hard x-ray nanobeam
SPIE Optics + Photonics 2008 (August 11-14 2007San, Diego, California USA) Proc. SPIE, 7077 (2008) 707709.
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Y. Sano, T. Masuda, S. Kamisaka, H. Mimura, S. Matsuyama, and K. Yamauchi
Improvement of Thickness Uniformity of SOI by Numerically Controlled Sacrificial Oxidation Using Atmospheric-Pressure Plasma
2008 IEEE International SOI Conference (October 6-9, 2008/ Mohonk Moutain House, New Paltz, New York, USA) Proceedings 165-166
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T. Kimura, S. Handa, H. Mimura, H. Yumoto, D. Yamakawa, S. Matsuyama, Y. Sano, K.@Tamasaku, Y. Nishino, M. Yabashi, T. Ishikawa, K. Yamauchi
Development of adaptive mirror for wavefront control of hard x-ray nanobeam
2nd workshop on X-ray and XUV active optics (October 9-11, 2008, Torieste, Itary) Book of abstract pp.45-46
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H. Mimura (Invited)
Fabrication of 400mm long X-ray mirror by Electrolytic In-process Dressing Grinding and Elastic Emission Machining
The 6th CHINA-JAPAN, International Conference on Ultraprecision Machining, Extended Abstract 22-26 (Nov. 24-25, 2008, Hunan Univ. ,Changsha, China)