International Conference

  • T. Sugiura, A. Isohashi, W. Yamaguchi, S. Matsuyama, Y. Sano, and K. Yamauchi
    "A novel abrasive-free chemical planarization of oxide materials using pure water and Pt catalyst"
    European society for precision engineering & nanotechnology 2014 (Euspen 2014), Extended Abstracts, pp. 351-354, P7-14 (2-6 June, Dubrovnik, Croatia)

  • S. Matsuyama (invited)
    "Development of Achromatic Full-field X-ray Microscopy Based on Total Reflection Mirrors"
    Collaborative Conference on 3D & Materials Research (CC3DMR 2014), Abstract, pp. 142 (23-27 June, Incheon/Soul, South Korea)

  • H. Takei, S. Kurio, Y. Sano, S. Matsuyama, and K. Yamauchi
    "Improving the Accuracy of Numerically Controlled Sacrificial Plasma Oxidation Using an Array of Electrodes to Produce Ultra-uniform SOI"
    15th International Conference on Precision Engineering (ICPE2014), Abstracts, pp. 32, B15 (22-25 July, Kanazawa, Japan)

  • P. V. Bui, K. Inagaki, Y. Sano, K. Yamauchi, and Y. Morikawa
    "Removal Mechanism in Catalyst-Referred Etching Process for SiC Planarization"
    15th International Conference on Precision Engineering (ICPE2014), Abstracts, pp. 50, P05 (22-25 July, Kanazawa, Japan)

  • K. Shiozawa, Y. Sano, T. Doi, S. Kurokawa, H. Aida, O. Ohnishi, M. Uneda, Y. Okada, and K. Yamauchi
    "Removal Rate of Plasma Chemical Vaporization Machining of Intentionally Damaged Surface by Mechanical Action"
    15th International Conference on Precision Engineering (ICPE2014), Abstracts, pp. 53, P22 (22-25 July, Kanazawa, Japan)

  • Y. Takahashi (invited)
    "Coherent Diffraction Imaging with Focused Hard X-ray Beams"
    NSS-8 (The 8th International Workshop on Nanoscale Spectroscopy and Nanotechnology), (28-31 July, Chicago, US)

  • J. Kim, S. Matsuyama, Y. Sano, and K. Yamauchi
    "Development of high-precision figure measurement system for x-ray optics using laser focus microscope"
    SPIE Optics+Photonics2014, 9206-11 (17-21 August, San Diego, CA, US)

  • S. Matsuyama, Y. Emi, H. Kino, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    "Development of achromatic full-field hard X-ray microscopy and its application to X-ray absorption near edge structure spectromicroscopy"
    SPIE Optics+Photonics2014, 9207-27 (17-21 August, San Diego, CA, US)

  • T. Goto, S. Matsuyama, H. Nakamori, T. Kimura, Y. Sano, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi
    "Development of a two-stage x-ray focusing system with ultraprecise deformable mirrors"
    SPIE Optics+Photonics2014, 9208-1 (17-21 August, San Diego, CA, US)

  • T. Osaka (invited), T. Hirano, M. Yabashi, Y. Sano, K. Tono, Y. Inubushi, T. Sato, K. Ogawa, S. Matsuyama, T. Ishikawa, and K. Yamauchi
    "Development of split-delay x-ray optics using Si(220) crystals at SACLA"
    SPIE Optics+Photonics2014, 9210-8 (17-21 August, San Diego, CA, US)

  • Y. Sano (invited)
    "High-speed Etching of Wide-gap Semiconductors Using Atmospheric Pressure Plasma"
    Workshop on Ultra-Precision Processing (WUPP) for Wide-gap Semiconductors 2014, Abstracts pp. 8 (20-22 August, Bath, United Kingdom)

  • Y. Takahashi (invited)
    "Recent Progress of Hard X-ray Ptychography at SPring-8"
    International Workshop on Phase Retrieval and Coherent Scattering (Coherence2014), (2-5 September, Northwestern University, Evanston, Illinois, US)

  • W. Roseker, S. Lee, M. Walther, H. Schulte-Schrepping, T. Osaka, M. Sikorski, S. Song, P. H. Fuoss, G. B. Stephenson, A. Robert, and G. Grubel
    "Hard X-ray Delay Line for X-ray Photon Correlation Spectroscopy"
    International Workshop on Phase Retrieval and Coherent Scattering (Coherence2014), (2-5 September, Northwestern University, Evanston, Illinois, US)

  • A. Suzuki and Y. Takahashi
    "A Method for Ptychographic X-ray Imaging of Weak-Phase Objects"
    International Workshop on Phase Retrieval and Coherent Scattering (Coherence2014), (2-5 September, Northwestern University, Evanston, Illinois, US)

  • K. Shimomura, A. Suzuki, M. Hirose, and Y. Takahashi
    "High-resolution multislice x-ray ptychography in combination with precession measurement"
    International Workshop on Phase Retrieval and Coherent Scattering (Coherence2014), Poster number 28, (2-5 September, Northwestern University, Evanston, Illinois, US)

  • T. Osaka, T. Hirano, Y. Inubushi, M. Yabashi, Y. Sano, S. Matsuyama, K. Tono, T. Sato, K. Ogawa, T. Ishikawa, and K. Yamauchi
    "Development of Hard X-Ray Split-Delay Optics Based on Si(220) Crystals"
    JSAP-OSA Joint Symposia 2014 (The 75th JSAP Autumn Meeting 2014), Extended Abstracts pp.18-136, 17p-C4-3 (17-20 September, Hokkaido University, Hokkaido, Japan)

  • A. Isohashi, Y. Sano, T. Kato, and K. Yamauchi
    "Planarization of 6-in 4H-SiC wafer by Catalyst-referred etching"
    2014 European Conference on Silicon Carbide and Relative Materials (ECSCRM2014), Extended Abstracts pp.77, TU-P-20 (21-25 September, Grenoble, France)

  • P. V. Bui, K. Inagaki, Y. Sano, K. Yamauchi, and Y. Morikawa
    "First-Principles Study of HF Etching at Step Edges SiC Surfaces in Catalyst-Referred Etching Process"
    2014 European Conference on Silicon Carbide and Relative Materials (ECSCRM2014), Extended Abstracts pp.85, TU-P-48 (21-25 September, Grenoble, France)

  • A. Suzuki, K. Shimomura, S. Furutaku, K. Yamauchi, Y. Kohmura, T. Ishikawa, and Y. Takahashi
    "High-resolution hard x-ray ptychography of extended thick objects using multislice approach"
    International Conference on X-ray Microscopy (XRM2014), Conference Program Handbook pp.97 (26-31 October, Melbourne Convention and Exibition Center, Melbourne, Australia)

  • S. Matsuyama, Y. Emi, H. Kino, Y. Kohmura, K. Tamasaku, M. Yabashi, T. Ishikawa, and K. Yamauchi
    "Achromatic full-field X-ray microscopy using four total-reflection mirror"
    International Conference on X-ray Microscopy (XRM2014), Conference Program Handbook pp.103 (26-31 October, Melbourne Convention and Exibition Center, Melbourne, Australia)

  • K. Shimomura, A. Suzuki, M. Hirose, and Y. Takahashi
    "High-resolution multislice x-ray ptychography with precession measurement"
    International Conference on X-ray Microscopy (XRM2014), Conference Program Handbook pp.198 (26-31 October, Melbourne Convention and Exibition Center, Melbourne, Australia)

  • T. Hirano, T. Osaka, Y. Inubushi, M. Yabashi, Y. Sano, S. Matsuyama, K. Tono, K. Ogawa, T. Ishikawa, and K. Yamauchi
    "Development of Autocorrelator for Hard X-ray Free-Electron Laser"
    The 1st International Symposium on Interactive Materials Science Cadet Program (iSIMSC), PP-13 (16-19 November, Osaka, Japan)

  • K. Yamauchi (invited)
    "Atomically Controlled Surfacing of Single Crystalline SiC and GaN by Catalyst-Referred Etching"
    2014 International Conference on Planarization/CMP Technology (ICPT2014), Proceedings pp. 139-141, 8-1 (19-21 November, Kobe, Japan)

  • A. Isohashi, Y. Sano, and K. Yamauchi
    "Planarization of 4H-SiC(0001) by Catalyst-Referred Etching Using Pure Water Etchant"
    2014 International Conference on Planarization/CMP Technology (ICPT2014), Proceedings pp. 273-274, P25 (19-21 November, Kobe, Japan)

  • K. Shiozawa, Y. Sano, T. Doi, S. Kurokawa, H. Aida, K. Oyama, T. Miyashita, H. Sumizawa, and K. Yamauchi
    "Development of Basic-Type CMP/P-CVM Fusion Processing System (Type A) and Its Fundamental Characteristics"
    2014 International Conference on Planarization/CMP Technology (ICPT2014), Proceedings pp. 275-278, P26 (19-21 November, Kobe, Japan)

  • W. Yamaguchi, S. Sadakuni, A. Isohashi, H. Asano, Y. Sano, M. Imade, M. Maruyama, M. Yoshimura, Y. Mori, and K. Yamauchi
    "Atomic scale flattening of gallium nitride substrate grown by Na flux method applying catalyst referred etching"
    2014 International Conference on Planarization/CMP Technology (ICPT2014), Proceedings pp. 337-339, P47 (19-21 November, Kobe, Japan)