Department of Precision Science and Technology Graduate School of Engineering Osaka University 2-1 Yamadaoka, Suita, Osaka 565-0871 Japan Phone and FAX number: +81-6-6879-7286

Japanese page

Facilities & Apparatuses (Nov/10/2007)

Facilities

Ultra Clean Room (Japanese page)

Ultra Clean Facility
（The photos are on the homepage of Center for Atomistic Fabrication Technology, The 21st century COE Program, Osaka University.）

SPring-8

Process Apparatuses

Plasma CVM(photo)
EEM(photo)
CARE(photo)
X-ray multilayer fabrication apparutus(photo)
Electron beam evaporation（ULVAC）(photo)
Wet bench(HITACHI PLANT HP001)(photo)
Elector-chemical STM/AFM（SII）(photo)
FIB（HITACHI FB-2100）(photo)

Figure Measurement Apparatuses

X-ray mirror measurement system(photo)
Optical Interferometry　（ZYGO　NewView 200）(photo)
Fizeau interferometer（ZYGO-GPI）(photo)
AFM(SII SPA-400)(photo)
AFM（Digital Instruments）(photo)
STM(JEOL)(photo)
Confocal scanning laser microscopy（OLYMPUS LEXT OLS 3100）(photo)
Surface Profiler(TOKYO SEIMITSU surfcom 590-3D)(photo)
Optical microscopy(photo)
Ellipsometer(photo)
SEM（HITACHI S-4800）(photo)
TEM(photo)

Impurity Measurement Apparatuses

TRFX(photo)
ICP-MS(photo)

Surface Measurement Apparatuses

X-ray-focused Unit(photo)
TDS(photo)
FTIR(photo)
XPS（ULVAC-PHI PHI Quantum 2000）(photo)
SREM(photo)