Yamauchi Department of Precision Science and Technology
Graduate School of Engineering
Osaka University
2-1 Yamadaoka, Suita, Osaka 565-0871 Japan
Phone and FAX number: +81-6-6879-7286
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 Introduction
Our laboratory researches the giant-scale nanotechnology that enables us to fabricate atomically controlled surfaces with the size of more than several hundreds of millimeters. In recent years, nano-fabrication and nano-measurement methods such as EEM (elastic emission machining), PCVM (plasma chemical vaporization machining), UPW-ECM (ultrapure water electro-chemical machining), CARE (catalyst referred etching), MSI (microstitching interferometry), RADSI (relative-angle determinable stitching interferometry) were successfully developed and actually applied to fabricating atomically smoothed semiconductor wafers, high-performance electronic and optical devices, X-ray optical devices, SR based X-ray microscopy system, and so on.

Such cutting-edge products or instruments contribute to the many scientific fields including biology, medical and pharmaceutical sciences, semiconductor device technology, and X-ray free electron laser optics etc. In educational viewpoint, students study not only their intrinsic research themes in the fields of nano-processing and nano-metrology, but also the additional themes concerning to the other groups of the different research fields, with which they are collaborating. The multi-major education is a unique system of our laboratory automatically realized in our collaborative works with the different groups.
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