International Conference

  • J. Yamada, S. Matsuyama, N. Nakamura, T. Inoue, T. Osaka, I. Inoue, H. Yumoto, T. Koyama, H. Ohashi, K. Yamauchi, and M. Yabashi
    "Single-grating interferometer for hard X-ray sub-10 nm focusing mirror system"
    6th International Conference on X-ray Optics and Applications 2021 (XOPT2021) Oral (19 April, ONLINE)

  • T. Inoue, S. Matsuyama, Y. Tanaka, K. Futamura, Y. Ichii, J. Yamada, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, and K. Yamauchi
    "Development of sub-5 nm focusing system based on precise deformable mirrors"
    6th International Conference on X-ray Optics and Applications 2021 (XOPT2021) Oral (19 April, ONLINE)

  • S. Matsumura, S. Nakano, Y. Sano, T. Osaka, I. Inoue, M. Yabashi and K. Yamauchi
    "Processing a micro channel-cut crystal monochromator using Ni wire for reflection self-seeded X-ray free-electron laser"
    6th International Conference on X-ray Optics and Applications 2021 (XOPT2021) Oral (19 April, ONLINE)

  • Y. Nishioka, T. Inoue, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, K. Yamauchi
    "Optimization of mirror deformation method for hybrid bender combining mechanical and piezoelectric bending"
    6th International Conference on X-ray Optics and Applications 2021 (XOPT2021) Oral (19 April, ONLINE)

  • Y. Tanaka, S. Matsuyama, T. Inoue, N. Nakamura, J. Yamada, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, and K. Yamauchi
    "Development of wavefront sensing in full-field X-ray microscopy"
    6th International Conference on X-ray Optics and Applications 2021 (XOPT2021) Oral (19 April, ONLINE)

  • T. Inoue, Y. Nishioka, S. Matsuyama, J. Sonoyama, K. Akiyama, H. Nakamori, Y. Sano, Y. Kohmura, M. Yabashi, T. Ishikawa, L. Assoufid, K. Yamauchi
    "Optimization of mirror deformation strategy using mechanical and piezoelectric bending system"
    SPIE Optics+Photonics2021, Oral (1-5 Aug., ONLINE)

  • Y. Tanaka, S. Matsuyama, T. Inoue, N. Nakamura, J. Yamada, Y. Kohmura, M. Yabashi, K. Omote, T. Ishikawa, K. Yamauchi
    "Image-based wavefront measurement for full-field X-ray microscopy"
    SPIE Optics+Photonics2021, Oral (1-5 Aug., ONLINE)

  • Y. Sano (invited)
    "High-Speed Plasma Etching of SiC Wafer Toward Backside Thinning"
    240th ECS Meeting (DIGITAL MEETING), H03-0992 (13 October, 2021)

  • K. Yamauchi (invited)
    "Atomically controlled polishing for precision optics"
    The 7th International Conference on Nanomanufacturing (nanoMan2021), Keynote speech, (17-19 Nov., ONLINE)